clex09.in : Inverter Cell with Physical Geometry
Requires: CLEVER
An inverter is one of the most common cells found in layouts. This example contains one inverter cell designed with 4 NMOS and 4 PMOS transistors. It is an illustration of how Clever inserts auxilliary nodes, as in example clex05.in, where necessary into the layout. The back-annotated layout may then be re-plotted in Maskviews.
In this example, the etching process has the more physical 87 degree angled side-wall, so the structure was created using VictoryPorcess in cell mode.
This example has been used in the CLEVER Tutorial and more information on it can be found there.
To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.
Input Deck
go victoryprocess Init Layout=clex09.lay Depth=1 material=silicon RuleFile=clex09.lmp # Gate Stack Deposit material=Oxide Thickness=0.25 Max Deposit material=Polysilicon Thickness=0.3 Max etch material=polysilicon thick=0.36 angle=87 max mask=POLY Electrodes mask=POLY material=polysilicon Electrodes mask=*GATE material=polysilicon # Via 2 Deposit material=Oxide Thickness=0.25 Max Etch material=Oxide Thickness=0.9 angle=87 mask=VIA2 reverse max Electrodes mask=*CONT material=Silicon # Metal 1 Deposit material=Aluminum Thickness=0.25 Max Etch material=Aluminum Thickness=0.3 angle=87 max mask=MET1 Electrodes mask=MET1 material=Aluminum # Via 3 Deposit material=Oxide Thickness=0.25 Max Etch material=Oxide Thickness=0.3 angle=87 max mask=VIA3 reverse # Metal 2 Deposit material=Aluminum Thickness=0.5 Max Etch material=Aluminum Thickness=0.6 angle=87 max mask=MET2 Electrodes mask=MET2 material=Aluminum # Passivation Deposit material=Oxide Thickness=0.25 Max Save Name=clex09_0 ## After creating the 3D structure ## ## Perform the Interconnect Analysis ## go clever ## Process Description ## Init structure="clex09_0.str" Layout="clex09.lay" Depth=1 Map="clex09.lmp" Save Spice="clex09.before.net" Interconnect Adapt=(0.04, 0.02) Save Spice="clex09.net" quit