Performing a 2D Interconnect Simulation in Clever

clex12.in : Performing a 2D Interconnect Simulation in Clever

Requires: CLEVER

A useful option included within Odin is its ability to operate in 2D or 1D mode. This greatly reduces simulation time and allows the user to check that important aspects of the process are correctly implemented.

This example consists of three layers of metal to illustrate the use of the Cut line feature in order to generate a 2D simulation. The example then goes on to perform the full 3D simulation of the same structure. It will be noted that the 3D simulation takes significantly longer to perform tasks such as the capcitance matrix calculation.

This example also demonstrates the use of the box command which forces Odin to increase the effective mask size by using the given coordinate around the edge of the masks leading to a 3D simulation. This ensures that fringing capacitances are better accounted for by increasing the volume around the perimeter which is meshed therefore increasing the volume within which fringing field lines are solved.

Comparison of the 3D and 2D capacitance matricies yields the expected result of larger capacitances for the 3D simulation. This is because fringing capacitances in the 2D simulation in the Z direction are effectively eliminated. Notice the greatly reduced capacitance in the 2D calculation for non adjacent layers which are effectively shielded in the Z direction. Compare these results with the full 3D simulation where significant fringing capacitance occurs along the length of the structures.

Once the process simulation is complete the three-dimensional structure is saved with the Save statement and can be plotted using TonyPlot3d.

To load and run this example, select the Load example button in DeckBuild. This will copy the input file and any support files to your current working directory. Select the run button to execute the example.