Process Simulation Framework
3D
Victory Process is a general purpose layout driven 1D, 2D and 3D process simulator including Etching and deposition, Implantation, Diffusion and Oxidation simulation capabilities. Proprietary models, as well as public domain research models can be integrated into Victory Process using the open modeling interface.
2D
Athena framework integrates several process simulation modules within a user-friendly environment provided by Silvaco TCAD interactive tools. Athena has evolved from a world-renowned Stanford University simulator SUPREM-IV, with many new capabilities developed in collaboration with dozens of academic and industrial partners.
Rev. 042313_22