Athena_MISC : Miscellaneous Process Simulation Examples
- anmiex01.in : Multiple Impurities in a Material (BPSG)
- anmiex02.in : Epitaxial Growth
- anmiex03.in : Phosphorus Segregation Modeling
- anmiex04.in : Substrate Shear Stress
- anmiex05.in : MOSFET Scaling with the STRETCH command
- anmiex06.in : Salicide Example Using Titanium Silicide
- anmiex07.in : Selective and Non-selective Si Deposition
- anmiex08.in : Analytical Etch of a Trench with Angled Sidewalls and Undercuts