Miscellaneous Process Simulation Examples
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Miscellaneous Process Simulation Examples
Examples / TCAD Examples

Athena_MISC : Miscellaneous Process Simulation Examples

  • anmiex01.in : Multiple Impurities in a Material (BPSG)
  • anmiex02.in : Epitaxial Growth
  • anmiex03.in : Phosphorus Segregation Modeling
  • anmiex04.in : Substrate Shear Stress
  • anmiex05.in : MOSFET Scaling with the STRETCH command
  • anmiex06.in : Salicide Example Using Titanium Silicide
  • anmiex07.in : Selective and Non-selective Si Deposition
  • anmiex08.in : Analytical Etch of a Trench with Angled Sidewalls and Undercuts
Additional Info:
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These examples are for reference only. Every software package contains a full set of examples suitable for that version and are installed with the software. If you see examples here that are not in your installation you should consider updating to a later version of the software.
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