Salicide Example Using Titanium Silicide : Salicide Example Using Titanium Silicide

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example models a self aligned silicide (salicide) process.

No special commands are required to enable silicidation. Any interface between a refractory metal and silicon or polysilicon will cause growth of a silicide material.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.