Phosphorus Implant through Thick Nitride Layer : Phosphorus Implant through Thick Nitride Layer

Requires: SSuprem 4, MC IMPLANT
Minimum Versions: Athena 5.21.2.R

This example compares Monte Carlo and analytical methods for implantation into a multi layered structure. It shows that analytical methods are reasonably accurate even for the case when the profile peak is close to interface between two materials with quite different stopping powers. In most cases the default DOSE.MATCH method appears to be fairly adequate, but sometimes range scaling methods ( MAX.SCALE , for example) may give slightly better profiles in the deeper layer.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.