Tilt Angle Dependence using the SVDP Model

aniiex02.in : Tilt Angle Dependence using the SVDP Model

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example shows how 35 keV boron implant profile depends on the tilt angle. the SIMS Verified Dual Pearson ( SVDP ) method is used. The parameter PRINT.MOM specifies that moments used in each simulation should be printed out. As can be seen the boron distribution is very sensitive even for a small variation in the tilt angle.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.