Tilt Angle Dependence using the SVDP Model

aniiex02.in : Tilt Angle Dependence using the SVDP Model

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example shows how 35 keV boron implant profile depends on the tilt angle. the SIMS Verified Dual Pearson ( SVDP ) method is used. The parameter PRINT.MOM specifies that moments used in each simulation should be printed out. As can be seen the boron distribution is very sensitive even for a small variation in the tilt angle.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.