Inverter Cell with Lithographic Geometry : Inverter Cell with Lithographic Geometry

Requires: CLEVER

An inverter is one of the most common cells found in layouts. This example contains one inverter cell designed with 4 NMOS and 4 PMOS transistors. It is an illustration of how Clever inserts auxilliary nodes, as in example, where necessary into the layout. The back-annotated layout may then be re-plotted in Maskviews.

This example applies lithographic techniques to more accurately simulate the non-uniform barrier layer, formed by the resist after the imaging photolithographic stage. Victory Process is called upon once again to simulate the non Manhatton structure creation. The etching process also uses a more physical 87 degree angled side-wall.

This example has been used in the CLEVER Tutorial and more information on it can be found there.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.