Comparison of Gaussian, Pearson and SVDP methods

aniiex01.in : Comparison of Gaussian, Pearson and SVDP methods

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example compares implant analytical models: Gaussian (symmetrical) profile, single Pearson (amorphous implant), and SIMS Verified Dual Pearson ( SVDP ) method. The parameter PRINT.MOM specifies that moments used in each simulation should be printed out. The MOMENTS statement is used to select the tables.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.