Trench Filling and Planarization

anelex09.in : Trench Filling and Planarization

Requires: Elite
Minimum Versions: Athena 5.21.2.R

A simple trench filling, planarization, and etch back is demonstrated in this example. The initial trench profile was defined using the ETCH statement with a bottom critical dimension of 0.6 um and 87 degree sidewall slopes.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.