Ion Milling of Aluminum

anelex10.in : Ion Milling of Aluminum

Requires: Elite
Minimum Versions: Athena 5.21.2.R

This example demonstrates Athena/Elite ion milling using the RIE model. Ion milling shows a strong directional dependence. For this example, the incoming ion flux is vertical. This is modeled by using the RIE model with a directional component only. This results in a vertical penetration.

A machine called ionmill is defined and applied to the window structure. After each one minute etch, a structure file is saved. Following the last ion milling step, the structures are plotted sequentially.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.