Effect of Young's Modulus on Bird's Beak

anoxex07.in : Effect of Young's Modulus on Bird's Beak

Requires: SSuprem 4
Minimum Versions: Athena 5.22.3.R

This example illustrates a method for tuning the shape of bird's beak by varying elastic characteristics. This example also demonstrates how user defined materials can be created and used in Athena.

The example creates a comparison between the default coefficients for nitride and a user defined material that is similar to nitride but with modified elastic constants.

The simulation begins with the initial mesh definition in silicon.

Following the INITIALIZE statement, a MATERIAL statement redefines elastic constants for the new material nitride1 . The elastic constant s11.elast is a reverse value of Young's modulus for non-crystalline materials. This means that the aritficial material nitride1 is much stiffer than default nitride.

The new material can now be deposited and patterned just like any other default material in Athena . A deposition and an etch of nitride1 is performed.

Following the patterning of the new material, nitride is deposited and patterned, so that the structure has the right side with a nitride barrier to oxidation and the left side with a barrier made of the user defined stiff material nitride1 .

The structure is then oxidized and the final structure is plotted. The final structure shows that nitride1 is flexed much less than default nitride which results in a different shaped bird's beak on each side.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.