Polysilicon Oxidation

anoxex04.in : Polysilicon Oxidation

Requires: SSuprem 4
Minimum Versions: Athena 5.22.3.R

This example demonstrates the simultaneous oxidation of polysilicon and silicon. This example also shows the lifting of polysilicon as a small bird's beak is formed.

The example begins by forming a structure that is a sandwich of polysilicon, oxide, and silicon with a recessed area in the exposed silicon. Prior to oxidization, the coefficients for polysilicon oxidation are modified using the oxide statement.

The structure is then oxidized to show the polysilicon oxidation model. The dump parameter of the diffuse statement causes SSuprem 4 to save a structure file after each time step. The dump.pre parameter specifies that the name of these structure files will be of the form anoxex09mxxx.xxx.str where xxx.xxx is the current total time of the diffusion step. This allows the making of a movie using the MOVIE capability of TonyPlot .

The second TonyPlot statement loads intermediate files for a movie. To watch the movie, first select "Select all plots" from the "View" popup and then select "Movie.." from the "Tools" popup.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.