Ion Implant Tilt Angle Dependence : Ion Implant Tilt Angle Dependence

Requires: SSuprem 4, MC Implant
Minimum Versions: Athena 5.21.2.R

This example calculates 10 keV Be implant profiles in GaAs for 0 and 7 degrees implant angles. The BCA implant model is used. The results show that ion channeling is very pronounced for light Be ions.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.