Ion Implant Tilt Angle Dependence : Ion Implant Tilt Angle Dependence

Requires: SSuprem 4, MC Implant
Minimum Versions: Athena 5.21.2.R

This example calculates 10 keV Be implant profiles in GaAs for 0 and 7 degrees implant angles. The BCA implant model is used. The results show that ion channeling is very pronounced for light Be ions.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.