Geometric deposition models in 2D

vp2dex02.in : Geometric deposition models in 2D


Requires: Victory Process
Minimum Version: Victory Process 7.22.3.R

The example demonstrates different geometric deposition models. The example is set up such that a polysilicon window is created, followed by deposition of a nitride layer repeated 6 times, each showing the operation of a specific geometric deposition model.

Models explored in this example set are:

  • Max model, which is set up to show thicknesses greater than 0, less than 0 and equal to 0;
  • min mode with thickness value set greater than 0 (only option) ;
  • conformal model, and
  • directional mode.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.