Amorphous IGZO TFT Simulation 2. Simulation v.s Experiment : Amorphous IGZO TFT Simulation 2. Simulation v.s Experiment

Requires: Athena/Blaze/TFT
Minimum Versions: Athena 5.22.3.R / Atlas 5.28.1.R
This example performs Id/Vgs, Id/Vd, and CV simulations of TFT device with material properties corresponding to amorphous IGZO (indium galium zinc oxide) material and show comparison with published experiment data. Measured a-IGZO material DOS(density-of-state) by CV analysis is inserted into simulation input and show almost the same transfer curve and output curve behaviour.

Reference: Amorphous InGaZnO thin-film transistors - Part I: Complete Extracton of Density of States Over the Full Subband-Gap Energy Range, Yongsik Kim, et al., IEEE Transactions On Electron Devices Vol. 59, No. 10, Oct 2012
The example shows:

  • Structure formation using Athena syntax
  • Material and model settings for passivated IGZO
  • DOS(Density Of State) in a-IGZO bulk and at interface between IGZO and gate insulator
  • Forward Id/Vgs characteristics and comparison with experiment
  • Ouput Id/Vds characteristics and comparison with experiment
  • multi-frequency CV characteristics with extracted DOS(Density Of State)

The key command in a-IGZO:TFT simulation is the Source/Drain Schottky barrier and height This is done by proper workfunction of source/drain metal and activated by model UST(Universal Schottky Tunnling Model). gate metal and both S/D metal are the same workfunction=5.0 [eV]
DOS-defect/intdefect statement. It is used to define a continuous density of trap states in the a-IGZO active channel and the relevant trapping cross-sections.Also bottom interface fixed charge. For this purpose, we used C-interpreter function to define DOS in IGZO active channel region.
IDVG/IDVD DC Analysis The Id/Vgs and Id/Vd ramping is done in a similar manner to the threshold voltage tests for MOS devices described in the MOS examples. CV-analysis The Cgs and Cgd are simulated and compared to published data for each frequency.
The measured data were taken from published paper with digitizer.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.