Trench Oxidation : Trench Oxidation

Requires: SSuprem 4, Elite
Minimum Versions: Athena 5.21.2.R

This example shows the use of Elite to model a trench process using two different etch conditions. Following the trench formation, an oxide layer is grown. Note that "uneven" surfaces resulted from Elite etch don't prevent to simulate the oxidation process.

The final structures are then plotted using TonyPlot .

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.