Multi-level Interconnect Formation

anex05.in : Multi-level Interconnect Formation

Requires: SSuprem 4, Elite
Minimum Versions: Athena 5.21.2.R

This example shows the use of Elite to model a complete interconnect system over isolation oxide grown using SSuprem 4 .

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.