Metal Patterning Over Non-planar Topography

anex04.in : Metal Patterning Over Non-planar Topography

Requires: SSuprem 4, Elite, and Optolith
Minimum Versions: Athena 5.21.2.R

This example demonstrates optical lithography over non-planar topography. Optolith is invoked to expose and develop the photoresist.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.