Optimization of Phase Shift Mask

anopex22.in : Optimization of Phase Shift Mask

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.22.3.R

This example uses the looping capability of DBInternal for optimization of sub-imageable ( < 0.12 um) 180 degree phase shift outriggers. The example is based on example anopex03.in. The maximum intensity is extracted as a function of two parameters: the distance of the shifters from center of the contact hole mask and width of the shifters. The final hole structures are shown for all 15 conditions simulated.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.