Aerial Image Calculation for Mask Pattern with Non-Manhattan Geometry

anopex15.in : Aerial Image Calculation for Mask Pattern with Non-Manhattan Geometry

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.22.3.R

Calculate the aerial image of a mask with non-Manhattan geometry. This example includes a 45 degree metal joint and a circular contact opening.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.