Demonstration of Multilayer Resists

anopex13.in : Demonstration of Multilayer Resists

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.22.3.R

This example demonstrates the use of multiple resists for a possible contrast enhancement layer.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.