Use of AquaTAR for CD Variation with Resist Thickness

anopex12.in : Use of AquaTAR for CD Variation with Resist Thickness

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.22.3.R

This example demonstrates the use of an AquaTAR to minimize reflection effects inside the resist. The example uses DBInternal capabilities to generate a swing curve for resist thickness variation from 0.9 to 1.2 microns.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.