20nm Undoped Channel, Ultra-Thin Body and Buried Oxide Fully Depleted SOI NMOSFET in 2D

soiex12.in : 20nm Undoped Channel, Ultra-Thin Body and Buried Oxide Fully Depleted SOI NMOSFET in 2D

Requires: Victory Process/Victory Mesh/Victory Device
Minimum Versions: Victory Process 7.30.4.R / Victory Mesh 1.4.6.R / Victory Device 1.14.1.R

This example is similar to the previous soiex11.in example, except that it aims at pointing a simple way to generate a 2D 20nm FDSOI NMOSFET from the existing 3D process flow in the previous soiex11.in example.

When a mask layout file is used for process simulation, a 2D simulation deck in Victory Process differs from a 3D simulation deck only in that a 2D simulation domain (2D cut) must be defined within the mask using the FROM and TO parameters as well as the AT parameter of the INIT statement. In this example, a 2D cut is made at the position Y = 0.02 (AT=0.02) within the soiex12.lay mask, which is idential to the soiex11.lay mask used in the previous soiex11.in example, to create a 2D FDSOI NMOS structure. The cut line is parallel to the X-axis starting from the point X = 0 (FROM=0) , which coincides with the left side of the mask area, to the point X = 0.12 (TO=0.12) , which coincides with the right side of the mask area. As this X cut-line at the Y = 0.02 position within the mask results in a 2D simulation in XZ plane, the FLOW.DIM=2D_XZ parameter is also specified in the INIT statement to enforce the 2D symmetry mode right from the beginning of the simulation flow.

The resulting 2D FDSOI NMOSFET is meshed using Victory Process. In addition, the maximum level of obtuseness of a triangle in the device mesh is set to MAX.OBTUSENESS=1. The lower the value of MAX.OBTUSENESS, the more triangles of the resulting conformal device mesh are less obtuse.

Like the previous soiex11.in example, the Id-Vd characteristics of the 2D 20nm FD-SOI MOSFET are simulated with various carrier transport models using Victory Device.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.