Simulation of Remote Phonon Scattering Mobility : Simulation of Remote Phonon Scattering Mobility

Requires: S-Pisces
Minimum Versions: Atlas 5.24.1.R

This simulation demonstrates the effects or remote phonon scattering on the effective mobility in high-k gate dielectric MISFET devices.

It demonstrates:

  • Basic structure definition using Atlas syntax
  • Application of high-k remote phonon scattering mobility model
  • Using probe to extract effective mobility versus perpenicular field
  • Plotting output curves and structures.

To load and run this example, select the Load example button in DeckBuild. This will copy the input file and any support files to your current working directory. Select the run button to execute the example.