Phosphorus Pile-up During Oxidation : Phosphorus Pile-up During Oxidation

Requires: SSuprem 4
Minimum Versions: Athena 5.22.3.R

This example demonstrates the effect of Phosphorus pile-up during oxidation. To clearly demonstrate the pile-up effect the example starts with constant P concentration of 1e18 /cm^3. The effect is most pronounced when oxidation is more intensive than diffusion, so phosphorus piling-up due to moving oxidation front does not have time to diffuse inside the bulk. High pressure is used to increase oxidation rate. If the standard Fermi model for diffusion is used, the pile-up effect is exaggerated because oxidation enhanced diffusion is not taken into account. More realistic profiles can be obtained using the Two.dim model. In this case phosphorus diffuses faster inside the bulk which prevents the formation of a very high pile-up.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.