Phosphorus Predeposition using POCl : Phosphorus Predeposition using POCl

Requires: SSuprem 4
Minimum Versions: Athena 5.22.3.R

This example demonstrates simultaneous phosphorus predeposition and oxide growth. The oxygen content of the gas is specified by the parameters dryo2 press=0.8 in the diffuse statement. The phosphorus concentration is controlled by the c.phos parameter.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.