Impurity Activation Models : Impurity Activation Models

Requires: SSuprem 4
Minimum Versions: Athena 5.22.3.R

This example compares two Impurity Activation Models implemented in SSuprem 4. The first is the Solid Solubility Model which is default for all impurities except Arsenic. The second is the Static Impurity/Vacancy Clustering Model which is the default for Arsenic only. Any of these two models can be selected for a specified impurity/semiconductor combination. First, phosphorus diffusion simulation is made for the default Solid Solubility Model, while in the second part of the example the Clustering Model is specified for phosphorus in silicon.

Refer to the manual section 'Electrical Activation and Clustering Models' for a description of the models used.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.