Simulation of Remote Phonon Scattering Mobility : Simulation of Remote Phonon Scattering Mobility

Requires: S-Pisces
Minimum Versions: Atlas 5.28.1.R

This simulation demonstrates the effects or remote phonon scattering on the effective mobility in high-k gate dielectric MISFET devices.

It demonstrates:

  • Basic structure definition using Atlas syntax
  • Application of high-k remote phonon scattering mobility model
  • Using probe to extract effective mobility versus perpenicular field
  • Plotting output curves and structures.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.