Evolution of a Bird's Beak in Recessed SILO

anoxex01.in : Evolution of a Bird's Beak in Recessed SILO

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example demonstrates the bird's beak profile evolution for a Recessed SILO process. A nitride mask is deposited and patterned. A recess into the silicon is then performed using a sequence of etch statements.

SSuprem 4's ability to dump a structure after a specified number of time steps and TonyPlot's movie function are used to show the formation of the growing birds beak. This is accomplished by specifying DUMP and DUMP.PREFIX parameters in the DIFFUSE statement.

To watch the movie, first select "Select all plots" from the "View" popup, and then select "Movie.." from the "Tools" popup. Evolution of the vertical oxidation velocities is also shown in the movie. This was achieved by saving a set file with the Y velocity contours. This file is called anoxex02.set.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.