Imaging Using an Annular Illuminator

anopex04.in : Imaging Using an Annular Illuminator

Requires: SSuprem 4/Optolith
Minimum Versions: Athena 5.21.2.R

This example compares DUV lithography using annular and circular apertures.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.