Flash EPROM Formation

amex07.in : Flash EPROM Formation

Requires: SSuprem 4 and Elite
Minimum Versions: Athena 5.21.2.R

This example uses Adaptive griding to allow fast, accurate and easy simulation over a complex topography created using SSUPREM and Elite. The EPROMs are fabricated by Athena using the autogrid capability.

The example begins with a silicon substrate that is 10 microns wide and 10 micron deep. Two parameters on the adapt.parm statement specify the error criteria and the dopants for refinement. The parameter accur.mult specifies the multiplication factor for accurate control. This results in easy control for the dopant simulation in Athena.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.