MOS Device Structure : MOS Device Structure

Requires: SSuprem 4/Elite
Minimum Versions: Athena 5.21.2.R

This example shows the fabrication of a MOS structure using Elite and SSuprem 4 . The grid is adaptive and the BASE.MESH feature is automatically applied to the initial mesh generation. This is a good test for gridding of a planar structure.

The example begins without a grid definition. A MOS grid template is used. This template is installed under the subdirectory var/athena.grid in the Silvaco Installation Directory. The template can be modified and reused for another similar simulation.

Finally, the structure is plotted using TonyPlot and the structure saved to a file.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.