Tilt Implant and Anneal on Irregular Mesh

amex04.in : Tilt Implant and Anneal on Irregular Mesh

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example shows the tilt implantation into a trench structure using adaptive gridding technique in SSuprem 4 .

The example begins with an initial grid structure. The METHOD ADAPT statement specifies the adaptive gridding option.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.