LOCOS Isolation Structure

amex03.in : LOCOS Isolation Structure

Requires: /SSuprem 4/Elite
Minimum Versions: Athena 5.21.2.R

This example shows the fabrication of a trench isolation structure using Elite and SSuprem 4 to model etching and oxidation processes. We test this as a nonplanar structure application for base mesh generation.

The example begins without a grid definition. The GRID.MODEL statement specifies a grid type LOCOS .

Finally, the structure is plotted using TonyPlot and the structure is saved to a file.

To load and run this example, select the Load button in DeckBuild > Examples. This will copy the input file and any support files to your current working directory. Select the Run button in DeckBuild to execute the example.