Different metals on the same level

questex08.in : Different metals on the same level

Requires: QUEST Minimum Versions: QUEST 2.0.2.R

This example is 3D Interconnect with different metals on the same level. To load and run this example, select the Load example button in DeckBuild. This will copy the input file, GDSII file and results to your current working directory. Select the run button to execute the example.

The GDSII file can be viewed in MaskViews, Expert or any other layout editing tool that can read GDSII format.

The process is defined with multiple metals on the same level. The VIA "type" in the deposit command is not used. METAL "type" is used instead using layers in the gds. Use two consecutives conductor layers (to have two different conductor on the same level) as shown below:

deposit type = "metal" layername = "via1" thick = 0.3 matName = "copper"
deposit type = "metal" layername = "via2" thick = 0.3 matName = "aluminum"

In this example derived layers of "via2" were created and used to connect M1to M3 (via2_1 and via2_2 in the example).

A two port simulation is defined by using the reserved electrode name called "subs_ground". This grounds out the reference electrode for both the "IN" port and the "OUT" port of the two port network.

All the results will be placed in a directory structure under the name "questex08_db" which was defined with SAVE command.

Three dimensional structure files can be viewed with TonyPlot3d. All other RLCG and Q versus frequency data can be viewed with TonyPlot.