Standard Operating Procedures for Fabrication Process Simulations

This paper describes laboratory procedures for an installation of Silvaco TCAD software in a University setting. It includes detailed operating procedures, sample program, program responses, and output graphs.

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Advisor: Dr. Kevin Walsh - University of Louisville Prof of ECE and Cleanroom Director. Team Members: Tommy Roussel - University of Louisville MEMS Research Engineer, Mark Crain - University of Louisville MicroNanoTechnology Cleanroom Manager, and Dr. Robert Keynton - University of Louisville Director of Bioengineering and Cleanroom Associate Director. Their website is www.mems.louisville.edu