Announcing DevEdit

 

A Structure Definition Tool

 

DevEdit is the latest addition to SILVACO's MASTER framework. It is an interactive tool for defining and editing structures. DevEdit completes the portion of MASTER that supplies specialized services to individual process and device simulators. The other tools in this category (DeckBuild, TonyPlot, Movie and S-Layer) are already available.

DevEdit Features

The specification and modification of very general two dimensional structures are supported. Structures may contain regions of insulator, conductor, and semiconductor. Conductors may be defined to be electrodes with associated workfunctions. Doping profiles may be specified employing a variety of analytical forms.

DevEdit uses SILVACO's MASTER structure file format to communicate with process and device simulators. It can be invoked by a process or device simulator during a run, or by a user between runs of two different simulators (e.g. between running Elite and SSuprem4 or SSuprem4 and S-Pisces. Some tasks that previously required use of a process simulator can be handled entirely by DevEdit. Examples are the deposition of new layers and the idealized etching of regions (e.g., trench profiles). Specifying large nonplanar structures such as power devices, for which full 2D process simulation is still impractical, is made much easier using DevEdit.

DevEdit is written in C++ and exploits the object-oriented features of the language. Structures are made up of regions. Attributes such as analytic doping profiles may be associated with regions.

We thank the SWR working group for helping to clarify issues associated with information modeling and data representation for process and device simulation[1].

Figure 1.

 

Optional Meshing Module

An optional meshing module that works in conjunction with DevEdit has been developed. This includes algorithms developed at ETH Zurich[2] and some additional concepts and techniques described in recent literature[3].

The meshing module generates high quality triangular meshes. It generates an initial mesh and supports user controlled mesh refinement and relaxation based on a variety of criteria. DevEdit can generate meshes that have no obtuse triangles. This is a very favorable property that improves the convergence of simulators such as S-Pisces 2B. As part of an agreement with Professor Wolfgang Fichtner of ETH Zurich, the meshing module is available for free to DevEdit licensees. We thank Professor Fichtner and his group for their contribution.

 

References

[1] A.Wong, W.Dietrich, and M. Karasick, eds.,
<169>The SWR Architecture Document,
Version 0.9c, Austin, TX: CAD Framework Initiative, February 1992.

[2] Meshbuild, Integrated Systems Laboratory, ETH Zurich.

[3] M.Bern and D.Eppstein,
Mesh Generation and Optimal Triangulation, Research Report,
Xerox Corporation, Palo Alto, 1992. (A version of this report will appear in Computing in Euclidean Geometry, F.K.Hwang and D.Z.Du, editors, World Scientific, 1992).