Contents

• Agenda
• Two levels of process simulation calibration
• Sources of errors in process simulation
• Model selection
• Implant calibration
• Oxidation calibration
• Diffusion calibration
  • Impurity segregation
  • Activation/Clustering
• Calibration using Optimizer
• Calibration using VWF
  • Sensitivity analysis
  • Virtual split lot
  • RSM fitting

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