CMOS Latchup Simulation

Contents:

  • Introduction
  • Process simulation requirements
  • Device simulation requirements
  • Case study
  • Layout of P+/N+ well boundary
  • Mask edges and grid for 2D cross section of layout
  • Final process structure with junctions
  • Final process structure with doping and depletion regions
  • Device simulation model requirements
  • Transient device simulation setup
  • Current vs. time during transient latchup
  • Comparison of 1ns and 3ns duration pulses
  • Flowlines in structure during Vss pulse
  • Flowlines in latched structure
  • DC latchup simulation setup
  • Positive DC bias on Vdd
  • Parasitic vertical pnp bipolar characteristic
  • Negative DC bias on Vss
  • Parasitic lateral npn bipolar characteristic
  • P+/N+ spacing
  • Overlay of two structures with different p+/n+ spacings
  • Comparison of positive DC latchup characteristics
  • Conclusion

Download full presentation (1.1Mb pdf - 24 pages)

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