Contents:

• Advanced dopant diffusion model
• Indtroduction
• Why a new diffusion model?
• PLS model
• Core diffusion model
• Core diffusion model results
• Interstitial cluster model
• Interstitial cluster model results
• Mixed dopant/defect clusters model
• Full PLS model simulators on implantation/diffusion
• PLS model in 2D
• Conclusion and future development

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