Contents:

• Summary
• Key benefits
• Applications
• Usage - When to use a Monte Carlo Simulator
• Contents
• Unusual topology - Shadowing, reflection, and re-implantation
• Unusual effects - 2 counter intuitive examples
• Calibration - Measured versus simulated data
• The Monte Carlo simulator is actually 2D
• Damage profiles and amorphization - dose effects
• Using statistics to accelerate simulation times
• Basic physics (cont'd)
• Conclusions - General capabilities
• Conclusion - de-channeling
• Conclusions - Process applications

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