Contents:

• Introduction
• Construction of SiGe HBT using ATHENA
• SiGe HBT layout
• SiGe HBT generated by ATHENA
• SiGe HBT
• SiGe HBT doping
• Vertical doping profile under the base electrode
• ATHENA generated mesh
• Mesh refinement using DevEdit
• Refined mesh generated by DevEdit
• Device characterization using ATLAS
• SiGe HBT gummel plot and gain curve
• Capacitance versus frequency
• Electron concentration and energy band diagram
• SiGe HBT worked example
• Worked example HBT
• Doping concentration
• Gummel plot gain curve
• Electrostatic potential and energy band diagram
• Conclusion

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