MEMS

The full text most of these papers may be found at the IEEE website at www.ieee.org.

T. Schmidt, K. Hahna, T. Binderc, J. Poppb, A. Wagener, R. Brück
"Optimization of MEMS fabrication process design by virtual experiments" Proceedings of SPIE - The International Society for Optical Engineering Volume 5-8 Dec. 20, 2006