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SSuprem4:

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SSuprem4 is a 2D process simulator that is widely used in the semiconductor industry for design, analysis and optimization of various fabrication technologies. SSuprem4 accurately simulates all major process steps in modern technology by using a wide range of physical models for diffusion, ion implantation, oxidation, etching, deposition, silicidation, epitaxy and stress formation. Within the ATHENA framework, SSuprem4 is fully integrated to Optolith for photolithography simulation, Elite for physical etching and deposition simulation and MCImplant for advanced Monte Carlo ion implantation.

REV. 122107_09