VWF

VIRTUAL WAFER FAB

VWF is software used for performing Design of Experiments (DOE) and Optimization Experiments. Split-lots can be used in various pre-defined analysis methods. Split parameters can be defined for any of Silvaco’s process, device, parasitic extraction and circuit simulators. All simulations can be carried out in parallel either on a cluster of workstations or on a single SMP machine. VWF comes with a GUI, that also enables examination of experimental results.

Key Features

• VWF can represent an entire flow from process simulation to spice circuit performance, or just part of the flow
• Flexible system allows experiments to be defined where any mix of masks, process parameters, device parameters, circuit parameters or tuning coefficients can be defined as input variables
• Experiments can be defined by varying the input parameters via a DOE such as Box Behnken, via an optimization algorithm like Levenberg-Marquardt or manually
• Output responses of interest can be measured from the entire flow including process characteristics such as oxide thickness, device characteristics such as a threshold voltage, or circuit characteristics such as rise time
• Each experimental variation can be run on a network of hosts to shorten simulation time
• Response models can be generated over the experimental spread and then input parameters can be rubber banded to see the effect on output responses
• A full worksheet of input and measured output responses can be exported to SPAYN for additional statistical analysis, or to TonyPlot for viewing purposes

Rev. 081710_05