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Victory
90-Day Roadmap - April 2008
    GEOMETRICAL ETCHING / DEPOSITION
  • Multi-threading of the geometrical etching deposition module
    PHYSICAL ETCHING
  • Multi-threading of surface propagation algorithms
  • Multi-threading of flux calculation routines
    ION MILLING
  • Material specific redeposition efficiencies
    OXIDATION/STRESSES
  • Multi-threading of interface propagation algorithms
  • Introduce stress dependency of oxygen transport during oxidation
  • Reduce the memory footprint of the oxidation module
    ION IMPLANTATION
  • Improve doping and damage profile discretization for large aspect ratio structures
  • Reduce the memory footprint of the Monte Carlo implantation module
  • Multi-threading of the Monte Carlo implantation module
    EXTRACTION
  • Deck based extraction of 2D cut-planes
  • Deck based extraction of 1D cut-lines

 
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