Silvaco - Products ATHENA 3 Year Roadmap

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ATHENA 1D SSuprem3

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ATHENA

3 Year Development Roadmap, 2010 - 2013

Low energy cluster implant models
Laser and flash annealing models
Physical models for doping and activation in advanced materials
Advanced etch and deposition models for aggressive geometries including highly non-planar devices
Multi-thread diffusion simulation

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