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ATHENA
Process Simulation Framework
ATHENA framework integrates several process simulation modules within a user-friendly
environment provided by Silvaco TCAD interactive tools. ATHENA has evolved
from a world-renowned Stanford University simulator SUPREM-IV, with many new
capabilities developed in collaboration with dozens of academic and industrial
partners. ATHENA provides a convenient platform for simulating processes used
in semiconductor industry: ion implantation, diffusion, oxidation, physical
etching and deposition, lithography, stress formation and silicidation. Rev. 112807_20 |
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