Salicide Example Using Titanium Silicide

anmiex06.in : Salicide Example Using Titanium Silicide

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example models a self aligned silicide (salicide) process.

No special commands are required to enable silicidation. Any interface between a refractory metal and silicon or polysilicon will cause growth of a silicide material.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.